Etude du nettoyage et de la préparation de surface du phosphure d'indium InP en chimie humide // Wet chemical cleaning and surface preparation of indium phosphide InP
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Grenoble
Hence, effective cleaning methods that reduce surface defects need to be developed. We will seek to develop solutions for the deoxidation, passivation and cleaning of InP surfaces by combining chemistry steps and in-situ pre-treatments (plasma for example).